Micro EDM process is generally used for machining microholes, cavities, and three dimensional shapes. For machining micro structures, first of all, micro tool electrode is indispensable and WEDG system is proposed for tool fabrication method. When using WEDG, its machining characteristics are highly affected by many EDM parameters such as applied voltage, current, rotation speed, capacitance, and pulse duration. Therefore, the design of experiment is introduced to fully understand the effect of the EDM parameters on machining tool electrode. And an attempt has been made to develop the mathematical model for predicting the size of the tool electrode by calculating spark distance. The suggested model was verified with experiment and predicted working gap distance is in good accord with the measured value.