Among ceramic membranes developed to date, amorphous silica membranes are attractive for gas separation at elevated temperatures. Most of the silica membranes can be formed on a porous support by sol-gel or chemical vapor deposition (CVD) process. To improve gas permselectivity of the membrane, well-controlled pores having desired size and chemical affinity between permeates and membrane become important factors in the preparation of membranes. In this article, we review the literature and introduce our technologies on the microstructure to be solved and pore size control of silica membranes using sol-gel and CVD methods.