The scanning laser source (SLS) technique has been proposed recently as an effective way to investigate small surface-breaking defects, By monitoring the amplitude and frequency changes of the ultrasound generated as the SLS scans over a defect, the SLS technique has provided enhanced signal-to-noise performance compared to the traditional pitch-catch or pulse-echo ultrasonic methods, An extension of the SLS approach to map defects in microdevices is proposed by bringing both the generator and the receiver to the near-field scattering region of the defects, To facilitate near-field ultrasound measurement, silicon microcantilever probes are fabricated using microfabrication technique and their acoustical characteristics are investigated, Then, both the laser-generated ultrasonic source and the microcantilever probe are used to monitor near-field scattering by a surface-breaking defect.