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Development of an Ultra Precision Hydrostatic Guideway Driven by a Coreless Linear Motor
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  • Development of an Ultra Precision Hydrostatic Guideway Driven by a Coreless Linear Motor
  • Development of an Ultra Precision Hydrostatic Guideway Driven by a Coreless Linear Motor
저자명
Park. Chun Hong,Oh. Yoon Jin,Hwang. Joo Ho,Lee. Deug Woo
간행물명
International journal of precision engineering and manufacturing
권/호정보
2005년|6권 2호|pp.55-60 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.