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저자명
박정연,박재준,권기환,조남규,안유민,이성환,황승용,Park. Jeong Yeon,Park. Jae Jun,Kwon. Ki Hwan,Cho. Nahm Gyoo,Ahn. Yoo Min,Lee. Seoung Hwan,Hwang. Seu
간행물명
한국정밀공학회지
권/호정보
2005년|22권 4호|pp.181-187 (7 pages)
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한국정밀공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this study, a microchip system fabricated with MEMS technology was developed to detect bioelectrical signals. The developed microchip using the conductivity of gold nanoparticles could detect the biopotential with a high sensitivity. For designing the microchip, simulations were performed to understand the effects of the size and number of nanoparticles, and the sensing width between electrodes on the detection of biosignals. Then, a series of experiment was performed to validate the simulation results and understand the feasibility of the proposed microchip design. Both simulation and experimental results showed that as the sensing width between electrodes increased the conductivity decreased. Also, the conductivity increased as the density of gold nanoparticles increased. In addition, it was found that the conductivity that changes with the nanoparticles density could be approximated by a cumulative normal distribution function. The developed microchip system could effectively apply when a biosignals should be measured with a high sensitivity.