In this paper, we propose a slider servo-mechanism driven by electro-magnetic actuator to improve straightness of linear motor stages. Based on axial-position dependent deterministic characteristics of the straightness error, a feedforward compensation control is appled to reduce the straightness error. In the consideration of uncertain properties of friction and its effects on positioning accuracy, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performances are illustrated along with some experimental results.