The silent discharge type ozonizer with three electrodes(central electrode, internal electrode, and external electrode) and one discharge gap(discharge gap between internal electrode and external electrode) has been designed and manufactured. It is a silent discharge type ozonizer for which the AC high frequency voltages applied to the central electrode within vacuum discharge tube and the internal electrode for which the external electrode is a ground Ozone is generated by silent discharge in discharge gap. At the moment, discharge characteristics and ozone generation characteristics were investigated in accordance with vacuum of discharge tube, frequency of AC power source, discharge power of ozonizer, and quantity of supplied oxygen gas. In consequence, ozone characteristics proportional to vacuum of discharge tube and frequency of AC power source. The maximum value of ozone can be obtained 7,700[ppm], 460[mg/h] and 70[g/kwh].