Monostatic RCS analysis of complex structures has been done with a combined method of physical and geometric optics, commonly applied to high frequency electromagnetic backscattering problems. In the analysis, the complex structure is modeled as a number of flat surfaces and the RCS of whole structure is calculated by summing RCS of each surface, which can be obtained from an analytical solution of flat surface phase integral derived from physical optics. The reflected and hidden surfaces are searched by an object precision method based on adaptive triangular beam method, which can take account for effects of multiple reflections and polarizations of electromagnetic wave. The validity of the presented RCS analysis method has been verified by comparing with exact solutions and measured data for various structures.