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On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment
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  • On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment
  • On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment
저자명
Lee. Jyh-Jone,Chen. Dar-Zen,Pai. Wei-Ming,Wu. Tzong-Ming
간행물명
Journal of mechanical science and technology
권/호정보
2006년|20권 12호|pp.2025-2033 (9 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper presents, the design of a latch mechanism for wafer containers in a standard mechanical interface environment. For an integrated circuits fabrication factory, the standard mechanical interfaced wafer container is an effective tool to prevent wafers from particle contamination during wafer storage, transporting or transferring. The latch mechanism inside the container door is used to latch and further seal the wafer container for safety and air quality. Kinematic characteristics of the mechanism are established by analyzing the required functions of the mechanisms. Based on these characteristics, a methodology for enumerating feasible latch mechanisms is developed. New mechanisms with one degree-of-freedom and up to five links are generated. An optimum design is also identified with respect to the criteria pertinent to the application. The computer-aided simulation is also built to verify the design.