- $SiH_4-Ar$ 혼합기체의 평균 에너지에 관한 연구
- ㆍ 저자명
- 김상남,Kim. Sang-Nam
- ㆍ 간행물명
- 전기학회논문지. The Transactions of the Korean Institute of Electrical Engineers. P
- ㆍ 권/호정보
- 2006년|55권 2호|pp.57-61 (5 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper calculates and gives the analysis of mean energy in pure $SiH_4,;Ar-SiH_4$ mixture gases ($SiH_4-0.5[%],;5[%]$) over the range of $E/N =0.01{sim}300[Td]$, p = 0.1, 1, 5.0 [Torr] by Monte Carlo the Backward prolongation method of the Boltzmann equation using computer simulation without using expensive equipment. The results have been obtained by using the electron collision cross sections by TOF, PT, SST sampling, compared with the experimental data determined by the other author. It also proved the reliability of the electron collision cross sections and shows the practical values of computer simulation. The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for $SiH_4$ and Ar, were used. The differences of the transport coefficients of electrons in $SiH_4$, mixtures of $SiH_4$ and Ar, have been explained by the deduced energy distribution functions for electrons and the complete collision cross-sections for electrons. A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been used to study electron transport coefficients.