An optical ROM card system which using an optical probe array generated by Talbot effect was proposed as new robust storage solution. To improve the optical density and to decrease the power consumption of the system, it is very important to make the spot sizes of optical probes smaller as well as to increase the optical efficiency from the light source to optical probes. In this study, a microlens illuminated aperture array for generating high efficiency optical probe away with small beam spot was designed and fabricated using monolithic lithography integration method. The maximum intensity of optical probes of microlens illuminated aperture array increased about 12 times of that of aperture array, and the full width half maximum of the optical probe at Talbot plane generated by microlens illuminated aperture array was $0.77{mu}m$.