- 초음파를 이용한 광소자 이송시스템의 빔형상에 따른 이송특성에 관한 연구
- ㆍ 저자명
- 정상화,최석봉,차경래,송석,김광호,Jeong. Sang-Hwa,Choi. Suk-Bong,Cha. Kyoung-Rae,Song. Suk,Kim. Gwang-Ho
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2006년|15권 6호|pp.8-14 (7 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The object transport system is used in many industry field such as the conveyor belt, which transports huge goods in container harbor, the magnetic levitation system, and the indexing system which transports precision components such as semiconductor and optical components. In conventional transport system, the magnetic field may damage semiconductor and the contact force may scratch on the optical lens. So ultrasonic wave transport system has been proposed to replace the previous transport system. In this paper, the good transport condition of optical lens is obtained according to the flexural beam shapes. The working frequency and transport speed are measured and the vibration characteristics of the flexural beams are investigated by Laser Scanning Vibrometer.