- 양극산화법에 의한 다공성 SnO2 피막
- ㆍ 저자명
- 한혜정,최재호,민석홍,Han. Hye-Jeong,Choi. Jae-Ho,Min. Seok-Hong
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2006년|16권 8호|pp.503-510 (8 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
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The measurement of specific gases is based on the reversible conductivity change of sensing materials in semiconductor type gas sensors. For an application as gas sensors of high sensitivity, porous $SnO_2$ films have been fabricated by anodizing of pure Sn foil in oxalic acid and characteristics of anodic tin oxide films have been investigated. Pore diameter and distribution were dependent on process conditions such as electrolyte concentration, applied voltage, anodizing temperature, and time. Characteristics of anodic films were explained with current density-time curves.