The decomposition of gaseous $CH_3CHO$ was investigated by metal loaded $TiO_2$ (pure $TiO_2,;Pt/TiO_2,;Pd/TiO_2,;Mn/TiO_2;and;Ag/TiO_2$) with $UV/TiO_2$ process and $UV/TiO_2/O_3$ process at room temperature and atmospheric pressure. Metal loaded $TiO_2$ was prepared by photodeposition. Decomposition of $CH_3CHO$ was carried out in a flow-type photochemical reaction system using three 10W black light lamps ($300{sim}400nm$) as a light source. The experimental results showed that the degradation rate of $CH_3CHO$ was increased with Pt and Ag on $TiO_2$ compared to pure $TiO_2$, but decreased with depositing Pd and Mn on pure $TiO_2$. The considerable increase in the degradation efficiency of the $CH_3CHO$ was found by a combination of photocatalysis and ozonation as compared to only by ozonation or photocatalysis. Loading of Pt on $TiO_2$ promoted conversion of gaseous ozone. The degradation rate of gaseous $CH_3CHO$ decreased with an increase of water vapor in the feed stream for the both $UV/TiO_2;and;UV/TiO_2/O_3$ processes. The pure $TiO_2$ was more affected by the water vapor than Pt loaded $TiO_2$.