- 전자군 방법에 의한 C3F8분자가스의 비탄성충돌단면적의 결정
- ㆍ 저자명
- 전병훈,Jeon. Byung-Hoon
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2006년|19권 3호|pp.301-306 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The electron drift velocity W and the product of the longitudinal diffusion coefficient and the gas number density $ND_{L}$ in the $0.525;\%$ and $5.05;\%$ $C_{3}F_8-Ar$ mixtures were measured by using the double shutter drift tube with variable drift distance over the E/N range from 0.03 to 100 Td and gas pressure range from 1 to 915 torr. And we determined the electron collision cross sections set for the $C_{3}F_8$ molecule by STEP 1 of electron swarm method using a multi-term Boltzmann equation analysis. Our special attention in the present study was focused upon the vibrational excitation and new excitations cross sections of the $C_{3}F_8$ molecule.