- 표면 탄성파를 이용한 온도센서의 제작 및 특성에 대한 연구
- ㆍ 저자명
- 박재홍,김재환,Park. Jae-Hong,Kim. Jae-Hwan
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2006년|23권 4호|pp.139-145 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents the design and manufacturing of a sensor using SAW and delay line in order to measure temperature. SAW sensors having single and double electrodes are manufactured on the $128^{circ}YX-LiNbO_3$ substrate, and its process is addressed. Before manufacturing, the device is simulated using a commercial finite element program. The frequency responses of the saw sensor on the temperature change is measured. Since the center frequency on the temperature change from $-30^{circ}C$ to $80^{circ}C$ is linearly changed, the saw sensor is applicable to measure the temperature change or strain variation.