This research presents the performance analysis of the linear type pneumatic actuators that are used in semi-conductor assembly line to transfer some product with high accuracy. To increase positioning and repetitive accuracies, a cross roller guide is implemented inside the pneumatic actuator. The finite element method is used to verify the force against working moments, and reliability analysis is performed to classify the breakdown cases. Also, reliability, failure rate, probability density function, and $B_{10}$ to life are estimated under the boundary of thrust or air leakage conditions. In this study, the failure probabilistic function of the pneumatic actuators is analyzed using Weibull distribution.