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Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation
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  • Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation
  • Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation
저자명
Bae. Hyeon,Kim. Sung-Shin,Woo. Kwang-Bang,May. Gary S.,Lee. Duk-Kwon
간행물명
International Journal of Control, Automation and Systems
권/호정보
2006년|4권 3호|pp.372-381 (10 pages)
발행정보
제어로봇시스템학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

The purpose of this study was to develop a process management system to manage ingot fabrication and improve ingot quality. The ingot is the first manufactured material of wafers. Trace parameters were collected on-line but measurement parameters were measured by sampling inspection. The quality parameters were applied to evaluate the quality. Therefore, preprocessing was necessary to extract useful information from the quality data. First, statistical methods were used for data generation. Then, modeling was performed, using the generated data, to improve the performance of the models. The function of the models is to predict the quality corresponding to control parameters. Secondly, rule extraction was performed to find the relation between the production quality and control conditions. The extracted rules can give important information concerning how to handle the process correctly. The dynamic polynomial neural network (DPNN) and decision tree were applied for data modeling and rule extraction, respectively, from the ingot fabrication data.