- Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation
- Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation
- ㆍ 저자명
- Bae. Hyeon,Kim. Sung-Shin,Woo. Kwang-Bang,May. Gary S.,Lee. Duk-Kwon
- ㆍ 간행물명
- International Journal of Control, Automation and Systems
- ㆍ 권/호정보
- 2006년|4권 3호|pp.372-381 (10 pages)
- ㆍ 발행정보
- 제어로봇시스템학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
