- 마이크로 가스센서의 열적 성능에 관한 연구
- ㆍ 저자명
- 주영철,김창교,Joo. Young-Cheol,Kim. Chang-Kyo
- ㆍ 간행물명
- 大韓機械學會論文集. Transactions of the Korean society of mechanical engineers. B. B
- ㆍ 권/호정보
- 2006년|30권 6호|pp.531-537 (7 pages)
- ㆍ 발행정보
- 대한기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A lever type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.