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Growth and Characteristics of Near-UV LED Structures on Wet-etched Patterned Sapphire Substrate
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  • Growth and Characteristics of Near-UV LED Structures on Wet-etched Patterned Sapphire Substrate
  • Growth and Characteristics of Near-UV LED Structures on Wet-etched Patterned Sapphire Substrate
저자명
Cheong. Hung-Seob,Hong. Chang-Hee
간행물명
Journal of semiconductor technology and science
권/호정보
2006년|6권 3호|pp.199-205 (7 pages)
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대한전자공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Patterned sapphire substrates (PSS) were fabricated by a simple wet etching process with $SiO_2$ stripe masks and a mixed solution of $H_2SO_4$ and $H_3PO_4$. GaN layers were epitaxially grown on the PSS under the optimized 2-step growth condition of metalorganic vapor deposition. During the 1st growth step, GaN layers with triangular cross sections were grown on the selected area of the surface of the PSS, and in the 2nd growth step, the GaN layers were laterally grown and coalesced with neighboring GaN layers. The density of threading dislocations on the surface of the coalesced GaN layer was $2{sim}4;{ imes};10^7;cm^{-2}$ over the entire region. The epitaxial structure of near-UV light emitting diode (LED) was grown over the GaN layers on the PSS. The internal quantum efficiency and the extraction efficiency of the LED structure grown on the PSS were remarkably increased when compared to the conventional LED structure grown on the flat sapphire substrate. The reduction in TD density and the decrease in the number of times of total internal reflections of the light flux are mainly attributed due to high level of scattering on the PSS.