- A Micro Tribotester for MEMS Elements
- A Micro Tribotester for MEMS Elements
- ㆍ 저자명
- Kim. Choong-Hyun,Ahn. Hyo-Sok
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2006년|15권 4호|pp.39-43 (5 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
A computer-controlled micro tribotester has been developed to investigate the friction and wear characteristics of thin coatings, which can be applied to silicon-based materials. In the developed system, a step motor gives a reciprocating movement and an electromagnet applies a load between a ball and a plate specimen. Test results confirmed that the application of load in the range of $0.03{sim}1.8N$ and with a sliding speed of $4.44{sim}7.70mm/s$ was successfully accomplished. Advantages of the developed micro tribotester are: (1) realization of micro load and displacement applicable to micro electromechanical systems(MEMS) using DC motor and electromagnet (2) continuously variable load and reciprocating speed; and (3) high reliability, which allows for unattended use for long periods.