- SiO2/P+ 컬렉터 구조를 가지는 1700 V급 고전압용 IGBT의 설계 및 해석에 관한 연구
- ㆍ 저자명
- 이한신,김요한,강이구,성만영,Lee. Han-Sin,Kim. Yo-Han,Kang. Ey-Goo,Sung. Man-Young
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2006년|19권 10호|pp.907-911 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we propose a new structure that improves the on-state voltage drop and switching speed in Insulated Gate Bipolar Transistors(IGBTs), which can be widely used in high voltage semiconductors. The proposed structure is unique in that the collector area is divided by $SiO_2$, whereas the conventional IGBT has a planar P+ collector structure. The process and device simulation results show remarkably improved on-state and switching characteristics. Also, the current and electric field distribution indicate that the segmented collector structure has increased electric field near the $SiO_2$ corner, which leads to an increase of electron current. This results in a decrease of on-state resistance and voltage drop to $30%{sim}40%$. Also, since the area of the P+ region is decreased compared to existing structures, the hole injection decreases and leads to an increase of switching speed to 30 %. In spite of some complexity in process procedures, this structure can be manufactured with remarkably improved characteristics.