- 힌지구조를 갖는 초소형 콘덴서 마이크로폰
- ㆍ 저자명
- 김혜진,이성규,박강호,Kim. Hye-Jin,Lee. Sung-Q,Park. Kang-Ho
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2007년|16권 3호|pp.174-178 (5 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm${ imes}$1.5 mm. From the simulation results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about $12.87{mu}V/Pa$ at 1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.