Topology optimization techniques have been developed as a very efficient design tool and utilized for design engineering processes in many industrial sections during the past decade. And topology optimization has become the focus into structural optimization design up to now. Recently, thermally actuated compliant mechanisms have a wide range of applications. In this research, the thermo-elastic problem is a coupled problem which has to consider heat transfer analysis and structural analysis. Hence, the thermo-elastic problem has to deal with heat transfer material properties and structural material properties at the same time. The numerical examples are presented. From the results, it was shown that in terms of the displacement after optimization. Moreover, this paper compared thermo-system, elastic-system with thermo-elastic system and was shown a good result of topology optimization while thermo-elastic system was used.