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A Dual-mode Pico-positioning System using Active Aerostatic Coupling
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  • A Dual-mode Pico-positioning System using Active Aerostatic Coupling
  • A Dual-mode Pico-positioning System using Active Aerostatic Coupling
저자명
Mizumoto. Hiroshi,Yabuta. Yoshito,Arii. Shiro,Yabuya. Makoto,Tazoe. Yoichi
간행물명
International journal of precision engineering and manufacturing
권/호정보
2007년|8권 2호|pp.32-37 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.