The development of information and telecommunication industries leads to the development of semiconductor and optical industries. In recent years, the demand of optical components is growing due to the demand of faster network. On the other hand, conventional transport systems are not adequate for transporting precision optical components and semiconductors. Because the conveyor belt can damage precision optical components with contact force and a magnetic system would destroy the inner structure of semiconductor with magnetic field, a new system for transporting optical components and semiconductors is required. One of the alternatives to the existing systems is a transport system using ultrasonic wave excitation since it can transport precision components such as semiconductors and optical components without damage. In this paper, a transport system using 2-mode ultrasonic wave excitation was developed for transporting optical components and semiconductor, and its performance was evaluated. The relationship between transporting characteristics and flexural beam shapes were evaluated.