A safety valve is used for protecting the pressure vessel and facilities by discharging the operating fluid into the valve from the accident when the pressure is over the designated value. The fluid is sulfurous acid and nitric acid. etc. in the semi-conductor assembly line. Thus the valve elements material must be acid resistance. Teflon, which is used generally as inner parts of a valve, tends to easily sticks to sliding surface by thermal expansion under high temperature. Some studies are performed to change teflon to another material and shape to have a better fluidity under the condition. The analysis of the thermal expansion is conducted by commercial FEM software to improve the problems. Boundary conditions were temperature and load in this study. From the analysis, the thermal expansion of stainless steel is verified to be lower than that of teflon under high temperature. Thus coupled teflon/stainless steel-made valve is applied to assembly line without danger due to thermal expansion.