In this paper, a robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. By the experiment, we proved that the developed the system gives acceptable performance when minute operations. Developed the micro-nano robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this system, micro gripper is designed and fabricated with MEMS technology and the displacement of jaw is up to 142.8 micro meter. We think that new robot system will be appropriate for micro system assembly tasks and life science application.