- 실차 적용을 통한 각속도센서 특성 연구
- ㆍ 저자명
- 김병우,Kim. Byeong-Woo
- ㆍ 간행물명
- 전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers
- ㆍ 권/호정보
- 2007년|56권 7호|pp.1218-1223 (6 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A surface micro machined angular rate sensor utilizing a vibrating MEMS structure on a silicon has been developed. These tuning fork angular rate sensors are extremely rugged, inherently balanced, and easy to fabricate. The device is fabricated using a temperature compensation method based on automatic gain control technique. A linearity of approximately 0.6%, limited by the on-chip electronics has been obtained with this new sensor. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.