- AFM에서의 정량적 힘 측정을 위한 마이크로 캔틸레버의 강성 교정
- ㆍ 저자명
- 김민석,최재혁,김종호,박연규,Kim. Min-Seok,Choi. Jae-Hyuk,Kim. Jong-Ho,Park. Yon-Kyu
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2007년|24권 6호|pp.96-104 (9 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.