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기판온도와 열처리 온도에 따른 CuInSe2 박막의 특성분석
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  • 기판온도와 열처리 온도에 따른 CuInSe2 박막의 특성분석
저자명
양현훈,정운조,박계춘,Yang. Hyeon-Hun,Jeong. Woon-Jo,Park. Gye-Choon
간행물명
전기전자재료학회논문지
권/호정보
2007년|20권 7호|pp.600-605 (6 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Process variables for manufacturing the $CuInSe_2$ thin film were established in order to clarify optimum conditions for growth of the thin film depending upon process conditions (substrate temperature, sputtering pressure, DC/RF Power), and then by changing a number of vapor deposition conditions and Annealing conditions variously, structural and electrical characteristics were measured. Thereby, optimum process variables were derived. For the manufacture of the $CuInSe_2$, Cu, In and Se were vapor-deposited in the named order. Among them, Cu and In were vapor-deposited by using the sputtering method in consideration of their adhesive force to the substrate, and the DC/RF power was controlled so that the composition of Cu and In might be 1 : 1, while the surface temperature having an effect on the quality of the thin film was changed from $100^{circ}C;to;300^{circ}C$ at intervals of $50^{circ}C$. The diffract fringe of X-ray, which depended upon the substrate temperature and the Annealing temperature of the manufactured $CuInSe_2$ thin film, was investigated. scanning electron microgaphs of represents a case that a sample manufactured at the substrate temperature of $100^{circ}C$ was thermally treated at $200{ imes}350^{circ}C$. As a result, at $500^{circ}C$ of the Annealing temperature, their chemical composition was measured in the proportion of 1 : 1 : 2. It could be known that under this condition, the most excellent thin film was formed, compared with the other conditions.