In this study, a 3-DOF XYZ micro parallel manipulator utilizing compliance mechanism is developed and analyzed. In so doing, a matrix method is used to rapidly solve displacements of the designed kinematic structure, and then kinematic characteristics of the developed manipulator are analyzed. Finally, the design analysis of the kinematic characteristics by changing hinge thickness and structure to improve workspace and translation motion is performed to show that the performance of the developed manipulator is relatively superior to the other similar kind of manipulators.