- 상용 LCD 패널을 이용한 광 마스크 제작
- ㆍ 저자명
- 이승익,고정현,이상영,박장호,소대화,Lee. Seung-Ik,Koh. Jeongh-Hyun,Lee. Sang-Young,Park. Jang-Ho,Soh. Dea-Wha
- ㆍ 간행물명
- 洞窟 : 한국동굴학회지
- ㆍ 권/호정보
- 2007년|77권 47호|pp.21-30 (10 pages)
- ㆍ 발행정보
- 한국동굴학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Photo-lithography lies in the middle of the wafer fabrication process. It is often considered as the most critical step in the IC process. We use a mask in exposure steps of the photo-lithography. Typically, 20 to 25 different levels of masks are required to complete an IC device. That means, if a photo process can be developed with the use of only one photo mask, we can reduce more process cost. To satisfy this, we plan to develop an alternative photo mask. For this reason, we chose to use a LCD. We expect to develop a LCD panel that can be changed by electrical control. This is the main idea about the adjustive photo mask. The Photo mask made of LCD panel will replace the former one.