Use of low temperature plasma treatment has been attempted in the textile industry and there the has been some success in the dyeing and finishing processes. In this paper, an attempt was made to apply low temperature plasma treatment to improve the antistatic property of polyester fabric. The polyester fabrics were treated under different conditions with low temperature plasma. An orthogonal array testing strategy was employed for obtaining the optimum treatment condition. After low temperature plasma treatment, the polyester fabrics were evaluated with different characterization methods, Under the observation of scanning electron microscope, the surface structure of the polyester fabric treated by low temperature plasma was found to be seriously altered which provided more capacity for polyester to capture moisture and hence increased the static charges dissipation. The relationship between moisture content and half-life decay time for static charges was studied and the results showed that the increase in moisture content would result in shortening of the time for static charges dissipation. Moreover, the antistatic property of the low temperature plasma treated polyester fabric was greatly improved. In addition, the antistatic property of the polyester fabric treated by low temperature plasma was compared with that of the polyester fabric treated with a commercial antistatic finishing agent.