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무전지 SAW 기반 마이크로 통합센서 및 무선 측정기술 개발
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  • 무전지 SAW 기반 마이크로 통합센서 및 무선 측정기술 개발
저자명
오해관,김태현,왕웬,양상식,이기근,Oh. Hae-Kwan,Kim. Tae-Hyun,Wang. Wen,Yang. Sang-Sik,Lee. Kee-Keun
간행물명
전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers
권/호정보
2007년|56권 8호|pp.1430-1435 (6 pages)
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대한전기학회
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정기간행물|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${sim}150;{mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{circ}C$ to $200^{circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${sim}10^{circ}/^{circ}C$.