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Additive 공정을 이용한 미세 피치용 니켈 메탈마스크의 제조 및 특성평가
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  • Additive 공정을 이용한 미세 피치용 니켈 메탈마스크의 제조 및 특성평가
저자명
박의철,임준형,김규태,박시홍,황수민,심종현,정승부,김봉수,주진호,Park. Eui-Cheol,Lim. Jun-Hyung,Kim. Kyu-Tae,Park. Si-Hong,Hwang. Soo-Min,Shim. Jong-Hyun,Jun
간행물명
전기전자재료학회논문지
권/호정보
2007년|20권 11호|pp.925-931 (7 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We successively fabricated the Ni metal mask by additive method and evaluated the effects of wetting agents addition on the microstructure, hardness, and friction coefficient. In the process, the additive patterns with fine hole and pitch were made by photolithography technique and subsequently Ni plate was electroformed on the patterns. We found that the microstructure and mechanical properties were significantly varied when the different combinations of the wetting agents were used. When the wetting agents of both SF-1 and SF-2 were added, the microstructure consisted of crystal and amorphous phases, the grain size reduced to 5-40 nm, the RMS value decreased to 11.4 nm and the wear resistance improved. In addition, the hardness was as high as 638 Hv which is higher than that of commercial stainless steel mask and this improvement is probably due to the presence of amorphous Phase and fine grain size. The improvement of the wear resistance can provide a higher reliability and a longer service life.