- 리니어모터 스테이지 편요오차 보상장치 제어
- ㆍ 저자명
- 이승현,강민식,Lee. Seung-Hyun,Kang. Min-Sig
- ㆍ 간행물명
- 한국소음진동공학회논문집
- ㆍ 권/호정보
- 2008년|18권 10호|pp.997-1005 (9 pages)
- ㆍ 발행정보
- 한국소음진동공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Linear motor stage is a useful device in precision engineering field because of its simple power transmission mechanism and accurate positioning. Even though linear motor stage shows fine positioning accuracy along travel axis, geometric dependent errors which relay on machining and assembling accuracy should be addressed to increase total positioning performances. In this paper, we suggests a cost effective yaw error compensation servo-system which is mounted on platform of the stage and nullify travel position dependent yaw error. This paper also provides a method of designing a sliding mode control which is robust to existing friction disturbance and model uncertainties. The reachability condition of slinding mode control for the yaw error compensating servo-system has been established. From some experimental results by using an experimental set-up, the sliding mode control showed its effective in disturbance rejection and its performance was superior to conventional linear controls.