To design micro flow sensor varying depending on temperature of driving heater in the detector of Oxide semiconductor, Markov chain MCM(MCMCM), which is a kind of stochastic and microscopic method, was introduced. The formulation for the thermal transfer equation based on the FDM to obtain the MCMCM solution was performed and investigated, in steady state case. MCMCM simulation was successfully applied, so that its application can be expanded to a three-dimensional model with inhomogeneous material and complicated boundary.