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Development of a Miniature Air-bearing Stage with a Moving-magnet Linear Motor
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  • Development of a Miniature Air-bearing Stage with a Moving-magnet Linear Motor
  • Development of a Miniature Air-bearing Stage with a Moving-magnet Linear Motor
저자명
Ro. Seung-Kook,Park. Jong-Kweon
간행물명
International journal of precision engineering and manufacturing
권/호정보
2008년|9권 1호|pp.19-24 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We propose a new miniature air-bearing stage with a moving-magnet slotless linear motor. This stage was developed to achieve the precise positioning required for submicron-level machining and miniaturization by introducing air bearings and a linear motor sufficient for mesoscale precision machine tools. The linear motor contained two permanent magnets and was designed to generate a preload force for the vertical air bearings and a thrust force for the stage movement. The characteristics of the air bearings, which used porous pads, were analyzed with numerical methods, and a magnetic circuit model was derived for the linear motor to calculate the required preload and thrust forces. A prototype of a single-axis miniature stage with dimensions of $120;(W);{ imes};120;(L);{ imes};50;(H);mm$ was designed and fabricated, and its performance was examined, including its vertical stiffness, load capacity, thrust force, and positioning resolution.