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A Nano-particle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions
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  • A Nano-particle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions
  • A Nano-particle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions
저자명
Chun. Doo-Man,Kim. Min-Hyeng,Lee. Jae-Chul,Ahn. Sung-Hoon
간행물명
International journal of precision engineering and manufacturing
권/호정보
2008년|9권 1호|pp.51-53 (3 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A new nano-particle deposition system (NPDS) was developed for a ceramic and metal coating process. Nano- and micro-sized powders were sprayed through a supersonic nozzle at room temperature and low vacuum conditions to create ceramic and metal thin films on metal and polymer substrates without thermal damage. Ceramic titanium dioxide ($TiO_2$) powder was deposited on polyethylene terephthalate substrates and metal tin (Sn) powder was deposited on SUS substrates. Deposition images were obtained and the resulting chemical composition was measured using X-ray photoelectron spectroscopy. The test results demonstrated that the new NPDS provides a noble coating method for ceramic and metal materials.