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Effect of Improved Surface Wetability and Adhesion of Undulated Diamond-like Carbon Structure with r.f. PE-CVD
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  • Effect of Improved Surface Wetability and Adhesion of Undulated Diamond-like Carbon Structure with r.f. PE-CVD
  • Effect of Improved Surface Wetability and Adhesion of Undulated Diamond-like Carbon Structure with r.f. PE-CVD
저자명
Jang. Young-Jun,Kim. Seock-Sam
간행물명
KSTLE international journal
권/호정보
2008년|9권 1호|pp.22-25 (4 pages)
발행정보
한국윤활학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper investigated the wetting and adhesion property of undulated DLC film with surface morphology controlled for a reduced real area of contact. The undulated DLC Films were prepared by 13.56 MHZ radio frequency plasma enhanced chemical vapor deposition (r.f. PECVD) by using nanoscale Cu dots surface on a Si (100) substrate. FE-SEM, AFM analysis showed that the after repeated deposition and plasma induced damage with Ar ions, the surface was nanoscale undulated. This phenomenon changed the surface morphology of DLC surface. Raman spectra of film with changed morphology revealed that the plasma induced damage with Ar ions significantly suppressed the graphitization of DLC structure. Also, it was observed that while the untreated flat DLC surfaces had wetting angle starting ranged from $72^{circ}$ and adhesion force of 333ni. Had wetting angle the undulated DLC surfaces, which resemble the surface morphology of a cylindrical shape, increased up to $104^{circ}$ and adhesion force decreased down to 11 nN. The measurements agree with Hertz and JKR models. The surface undulation was affected mainly by several factors: the surface morphology affinity to cylindrical shape, reduction of the real area of contact and air pockets trapped in cylindrical asperities of the surface.