- 수치해석을 통한 초미세 방전 소자의 방전 특성 연구
- ㆍ 저자명
- 서정현,강경두,Seo. Jeong-Hyun,Kang. Kyoung-Doo
- ㆍ 간행물명
- 전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers
- ㆍ 권/호정보
- 2008년|57권 4호|pp.641-647 (7 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we have studied the basic discharge characteristics of ac-type cylindrical microcavity structure. The structure has a two electrodes, which are positioned in the bottom of the cavity and in the side wall of the cylinder, respectively. The discharge showed asymmetric phenomena depending on the position of a cathode electrode. When the bottom electrode was a cathode, the discharge was stronger even though the area of the cathode was smaller than that of the anode. Simulation results revealed that the focused electric field toward the bottom electrode increased ion density in the space which in turn strengthened the cathode sheath and ionization process.