The paper deals with the numerical analysis and design optimization of polysilicon micro thermal flexure actuator. The deflection of a thermal actuator is implicitly related to the actuation time so that such deflection is to be maximized under the consideration of structural performances such as maximum stress and natural frequencies. At first, the structural formulation of a thermal actuator is reviewed, and its CAE based simulation is performed to verify the numerical model. A parametric study is then conducted to identify the mainly effective design variables. Finally, the design of a micro thermal actuator is explored in the context of deterministic optimization and reliability based design optimization in the present study.