- 릴레이 제어법을 이용한 유리패널의 정전부상에 관한 연구
- ㆍ 저자명
- 전종업,Jeon. Jong-Up
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2008년|25권 6호|pp.71-79 (9 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In the manufacture of flat panel display devices, there is a strong demand for contactless glass panel handling devices that can manipulate a glass panel without contaminating or damaging it. To fulfill this requirement, an electrostatic suspension device far glass panels where the glass panel is supported by electrostatic forces without any mechanical contact is proposed. To implement the system with low cost and compactness, switched-voltage control scheme that is based on the relay feedback control is utilized. Relay feedback control method deploys only a single high-voltage power supply that can deliver a DC voltage of positive and/or negative polarity and thus high voltage amplifiers that are costly and bulky are not needed any more. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping originating from the electrodes and levitated object. Using this scheme, a $100{ imes}100mm^2$ glass panel was levitated stably with airgap variation decreasing down to $1;{mu}m$ at an airgap of $100;{mu}m$.