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초정밀 직선 이송계용 능동 자기예압 공기베어링에 관한 연구
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  • 초정밀 직선 이송계용 능동 자기예압 공기베어링에 관한 연구
저자명
노승국,김수현,곽윤근,박천홍,Ro. Seung-Kook,Kim. Soo-Hyun,Kwak. Yoon-Keun,Park. Chun-Hong
간행물명
한국정밀공학회지
권/호정보
2008년|25권 6호|pp.134-142 (9 pages)
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한국정밀공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.