- 펄스폭 변조를 이용한 정전형 액추에이터의 구동 및 위치 검출 알고리즘
- ㆍ 저자명
- 민동기,전종업,Min. Dong-Ki,Jeon. Jong-Up
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2008년|17권 3호|pp.65-70 (6 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Capacitive position sensing with modulation technique is widely used in electrostatic actuator applications. To maximize the electrostatic force and the position-sensing gain, capacitors for driving and capacitors for sensing are shared, i.e, after applying the driving voltage with high-frequency modulating signals using op amps, the position is demodulated from the modulated signal. In high-voltage applications, however, low bandwidth of a high-voltage op amp hinders adding the high-frequency modulating signal to the driving voltage. In this paper, new and very simple driving and sensing method is proposed, in which the pulse-width modulated driving voltage eliminates the need of the high-frequency modulating signal for position sensing. This new algorithm is proved by the simulation results using Matlab/SIMULINK.