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Anisotropic, non-uniform misfit strain in a thin film bonded on a plate substrate
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  • Anisotropic, non-uniform misfit strain in a thin film bonded on a plate substrate
  • Anisotropic, non-uniform misfit strain in a thin film bonded on a plate substrate
저자명
Huang. Y.,Ngo. D.,Feng. X.,Rosakis. A.J.
간행물명
Interaction and multiscale mechanics
권/호정보
2008년|1권 1호|pp.123-142 (20 pages)
발행정보
테크노프레스
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Current methodologies used for the inference of thin film stresses through curvature measurements are strictly restricted to stress and curvature states which are assumed to remain uniform over the entire filmstrate system. These methodologies have recently been extended to non-uniform stress and curvature states for the thin film subject to non-uniform, isotropic misfit strains. In this paper we study the same thin filmsubstrate system but subject to non-uniform, anisotropic misfit strains. The film stresses and system curvatures are both obtained in terms of the non-uniform, anisotropic misfit strains. For arbitrarily non-uniform, anisotropic misfit strains, it is shown that a direct relation between film stresses and system curvatures cannot be established. However, such a relation exists for uniform or linear anisotropic misfit strains, or for the average film stresses and average system curvatures when the anisotropic misfit strains are arbitrarily non-uniform.