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Enhanced Cathode-Luminescence in a InxGa1-xN/InyGa1-y Green Light Emitting Diode Structure Using Two-Dimensional Photonic Crystals
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  • Enhanced Cathode-Luminescence in a InxGa1-xN/InyGa1-y Green Light Emitting Diode Structure Using Two-Dimensional Photonic Crystals
  • Enhanced Cathode-Luminescence in a InxGa1-xN/InyGa1-y Green Light Emitting Diode Structure Using Two-Dimensional Photonic Crystals
저자명
Choi. Eui-Sub,Lee. Jae-Jin
간행물명
Journal of electrical engineering & technology
권/호정보
2008년|3권 2호|pp.276-279 (4 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We report on the enhancement of cathode-luminescence in an $In_xGa_{1-x}N/In_yGa_{1-y}$ green light emitting diode structure using two-dimensional photonic crystals. The square lattice arrays of photonic crystals with diameter/periodicity of 200/500 nm were fabricated by electron beam lithography. Inductively coupled plasma dry etching was used to etch and define photonic crystals. Three samples with different etch depths, i.e., 170, 95, and 65 nm, were constructed. Field emission scanning electron microscope analysis shows that air holes of photonic crystal structure with inverted-cone shapes were fabricated after dry etching. Cathode-luminescence measurement indicated that up to 30-fold enhancement of cathode-luminescence intensity has been achieved.