- 전자빔증발법에 의한 Ba(Ti,Sn)O3막의 제조 및 특성
- ㆍ 저자명
- 박상식,Park. Sang-Shik
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2008년|18권 7호|pp.373-378 (6 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
$Ba(Ti,Sn)O_3$ thin films, for use as dielectrics for MLCCs, were grown from Sn doped BaTiO3 sources by e-beam evaporation. The crystalline phase, microstructure, dielectric and electrical properties of films were investigated as a function of the (Ti+Sn)/Ba ratio. When $BaTiO_3$ sources doped with $20{sim}50;mol%$ of Sn were evaporated, $BaSnO_3$films were grown due to the higher vapor pressure of Ba and Sn than of Ti. However, it was possible to grow the $Ba(Ti,Sn)O_3$ thin films with {leq};15;mol%$ of Sn by co-evaporation of BTS and Ti metal sources. The (Ti+Sn)/Ba and Sn/Ti ratio affected the microstructure and surface roughness of films and the dielectric constant increased with increasing Sn content. The dielectric constant and dissipation factor of $Ba(Ti,Sn)O_3$ thin films with {leq};15;mol%$ of Sn showed the range of 120 to 160 and $2.5{sim}5.5%$ at 1 KHz, respectively. The leakage current density of films was order of the $10^{-9}{sim}10^{-8}A/cm^2$ at 300 KV/cm. The research results showed that it was feasible to grow the $Ba(Ti,Sn)O_3$ thin films as dielectrics for MLCCs by an e-beam evaporation technique.