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An Intelligent Nano-positioning Control System Driven by an Ultrasonic Motor
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  • An Intelligent Nano-positioning Control System Driven by an Ultrasonic Motor
  • An Intelligent Nano-positioning Control System Driven by an Ultrasonic Motor
저자명
Fan. Kuang-Chao,Lai. Zi-Fa
간행물명
International journal of precision engineering and manufacturing
권/호정보
2008년|9권 3호|pp.40-45 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.